BRUSH CLEANING DEVICE AND CHEMICAL MECHANICAL POLISHING APPARATUS
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United States of America Patent
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Issued Date -
Oct 17, 2024
app pub date -
Apr 9, 2024
filing date -
Apr 9, 2024
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Abstract
A brush cleaning device includes a brush including an electrode therein; a cleaning tank in which the brush is accommodatable; a platen in the cleaning tank, the platen being spaced apart from the brush, and including an electrode therein that interacts with the electrode of the brush; and a voltage supplier having an electrode interacting with the electrode of the brush, and supplying a voltage to form an electrical field on the brush and the platen, wherein the brush includes a cylindrical body including a plurality of protrusions on a surface thereof, and pores in at least a portion of the plurality of protrusions; a particle collection pipe at a center of the cylindrical body; and a particle suction pipe in fluid communication with the particle collection pipe and extending radially to the pores at an outer surface of the brush.
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