TEMPERATURE-STABLE MEMS RESONATOR
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United States of America Patent
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Issued Date -
Oct 10, 2024
app pub date -
Sep 1, 2022
filing date -
Sep 3, 2021
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Abstract
A MEMS (microelectromechanical system) resonator (150) comprising a substrate (105), a resonator element (100), and a cavity (110). The resonator element (100) is separated from the substrate (105) by said cavity (110), and the resonator element (100) comprises a layer of single-crystalline silicon (101). The layer of single-crystalline silicon (101) is doped with phosphorus atoms to obtain a specific doping profile.
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