METHOD FOR PROCESSING A PLANAR OBJECT WITH THE AID OF A PLANAR DRIVE SYSTEM
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United States of America Patent
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Issued Date -
Oct 10, 2024
app pub date -
Jun 17, 2024
filing date -
Dec 23, 2021
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Abstract
The invention relates to a method for processing a planar object 30 with the aid of a planar drive system 1, wherein the planar drive system 1 comprises at least a stator assembly 3 each comprising a plurality of coil groups 4 for generating a stator magnetic field, a stator surface 5 above the stator assembly 3, and a rotor 100. The rotor 100 comprises a plurality of magnet units 105 for generating a rotor magnetic field, wherein the rotor 100 is movable above the stator surface 5 with the aid of an interaction of the stator magnetic field with the rotor magnetic field in a first direction 21 and/or a second direction 22 parallel to the stator surface 5 and/or is movable in a third direction 23 perpendicular to the stator surface 5, wherein a tool 120 is arranged at the rotor 100, wherein the planar object 30 is arranged between the stator surface 5 and the rotor 100, with the following steps:
- energizing the coil groups in such a way that the rotor comprises a predetermined height above the stator surface in the third direction.energizing the coil groups in such a way that the rotor moves along a predetermined trajectory, wherein the tool and the planar object are in mechanical contact, thereby processing the planar object.
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