GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Oct 10, 2024
app pub date -
Jun 18, 2024
filing date -
Dec 28, 2021
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Abstract
A gas laser device includes a laser chamber including an opening, an electrical insulating portion blocking the opening, a first electrode, and a second electrode facing the first electrode. The first electrode includes a contact region contacting the surface of the electrical insulating portion, an opposing surface facing the second electrode, and a first curved surface included in a region between the contact region and the opposing surface and convexly curved toward an outer side of the first electrode. In a cross section of the first electrode along a surface extending in a separation direction of the first electrode and the second electrode, the contact region is located on an inner side of the first electrode with respect to the first curved surface, and the first curved surface is a part of a circumference of a circle or an ellipse which does not intersect the electrical insulating portion.
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