MICROBOLOMETER SYSTEMS AND METHODS
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United States of America Patent
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Issued Date -
Oct 10, 2024
app pub date -
Apr 5, 2024
filing date -
Mar 11, 2019
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Abstract
Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the microbolometer array includes a cross-section having a first section, a second section substantially parallel to the first section, and a third section joining the first section and the second section.
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