SYSTEMS AND METHODS OF CLAMP COMPENSATION

United States of America Patent

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Issued Date
Oct 10, 2024
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Jun 18, 2024
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Nov 15, 2019

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Abstract

A positioning system, can include a control unit including a shear signal generator that can generate a modified shear element drive signal. The modified shear element drive signal can include an initial shear element drive signal and a compensation signal.

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Patent Owner	Address
FEI COMPANY	5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124

International Classification(s)

H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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Inventor Name	Address	# of filed Patents	Total Citations
Tacx, Paul	Roermond, NL	5	1
Verschueren, Edwin	Mierlo, NL	10	4

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SYSTEMS AND METHODS OF CLAMP COMPENSATION

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United States of America Patent

18747216

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18747216

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