THREE-DIMENSIONALLY STACKED MULTI-MODAL SENSOR FOR SIMULTANEOUSLY DETECTING PRESSURE AND TEMPERATURE AND METHOD OF MANUFACTURING SAME
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Oct 10, 2024
app pub date -
Mar 27, 2024
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Apr 7, 2023
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Proposed is a three-dimensionally stacked multi-mode sensor for simultaneously detecting pressure and temperature. The multi-mode sensor includes a temperature sensor part including a first thin film transistor; and a pressure sensor part including a second thin film transistor and a piezoresistive layer stacked in a perpendicular direction on the temperature sensor part, the piezoresistive layer including a piezoresistive sheet. The multi-mode sensor can accurately detect pressure and temperature simultaneously without being affected by temperature changes.
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