MANUFACTURING METHOD OF SUBSTRATE UNIT, AND SUBSTRATE UNIT

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United States of America Patent

APP PUB NO 20240332080A1
SERIAL NO

18417365

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Abstract

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A manufacturing method of a substrate unit includes forming a semiconductor laminated body on a substrate; forming a sacrificial layer on the semiconductor laminated body; forming a semiconductor functional layer on the sacrificial layer; and forming a protective film that covers at least a back surface of the substrate different from a formation surface on which the semiconductor laminated body is formed, a side face of the substrate, and a side face of the semiconductor laminated body.

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Patent Owner(s)

Patent OwnerAddress
OKI ELECTRIC INDUSTRY CO LTDTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
FURUTA, Hironori Tokyo, JP 32 61
IDA, Takahiro Tokyo, JP 4 16
ISHIKAWA, Takuma Tokyo, JP 53 390
KITAJIMA, Yutaka Tokyo, JP 22 196
KOSAKA, Toru Tokyo, JP 55 320
SUZUKI, Takahito Tokyo, JP 83 964
TANIGAWA, Kenichi Tokyo, JP 29 132

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