ROTATIONAL INTERFACE, CARRIER TRANSFER SYSTEM INCLUDING THE SAME, AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME
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United States of America Patent
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Issued Date -
Oct 3, 2024
app pub date -
Nov 3, 2023
filing date -
Mar 31, 2023
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Abstract
A rotational interface includes a base column extending in a first direction, a rotary unit, and a carrier plate extending from the base column in a second direction and connected to the rotary unit, the carrier plate includes a plate body extending in the second direction and coupled to the base column, and a storage pot disposed on the plate body and having an upper surface, and the storage pot includes a fixing pin located on the upper surface of the storage pot and that fixes a semiconductor carrier to the plate body.
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