METHOD AND APPARATUS FOR PRODUCING AT LEAST ONE HOLLOW STRUCTURE, MIRROR, EUV LITHOGRAPHY SYSTEM, FLUID FEED APPARATUS AND METHOD FOR FEEDING A FLUID
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United States of America Patent
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Issued Date -
Oct 3, 2024
app pub date -
Jun 13, 2024
filing date -
Dec 14, 2021
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Abstract
A hollow structure (28) is produced in a workpiece (25) to form a substrate for a mirror through material-removing processing with pulsed laser radiation (35). The pulsed laser radiation is focused into a focal region (39), forming a removal front (46) for the areal removal of material of the workpiece (25) by moving the focal region (39) along a movement pattern (41), and producing the hollow structure (28) by moving the removal front (46) within the workpiece (25). The removal front is not aligned perpendicular to an incoming radiation direction (Z) of the pulsed laser radiation (35) at the radiation entrance side (27) of the workpiece at least intermittently during the production. The hollow structure is produced in the form of a channel through which a fluid is able to flow.
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