PROBE APPARATUS, AND MEASUREMENT METHOD AND MEASUREMENT SYSTEM OF JUNCTION RESISTANCE OF SUPERCONDUCTING QUBIT
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United States of America Patent
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Issued Date -
Oct 3, 2024
app pub date -
Jun 6, 2024
filing date -
Dec 13, 2021
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Abstract
Disclosed are a probe apparatus, and a measurement method and a measurement system of a junction resistance of a superconducting qubit. The probe apparatus is configured to measure a superconducting quantum chip, and includes a probe set, a probe control mechanism, and a power supply module; the probe set includes two probes that are independent; the probe control mechanism is configured to control the probe set to be connected to an oxide layer on a surface of an electrode of a Josephson junction on the superconducting quantum chip; and the power supply module is configured to apply an electrical breakdown signal to two probes, to break down the oxide layer, so that the probe set forms a conductive connection with the electrode of the Josephson junction.
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