MULTI PUMP-PROBE ENCODING-DECODING FOR OPTO-ACOUSTIC METROLOGY
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United States of America Patent
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Issued Date -
Oct 3, 2024
app pub date -
Mar 21, 2024
filing date -
Mar 31, 2023
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Abstract
An opto-acoustic metrology device is configured to measure or inspect structures in a sample using both vertical and lateral transient perturbations. Multiple probe beams that have different locations of incidence may detect both the vertical and lateral transient perturbations produced by a pump beam, or a single probe beam may detect both the vertical and lateral transient perturbations produced by multiple pump beams that have different locations of incidence. The multiple probe beams or multiple pump beams are modulated with orthogonal waveforms, which allow the measurement of the different locations without interference from one another. The received signals are demodulated based on the orthogonal waveforms to recover the contributions to the received signals associated with each of the multiple probe beams or each of the multiple pump beams.
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