COMBINED SIX-DIMENSIONAL FORCE SENSOR BASED ON THIN-FILM SPUTTERING TECHNOLOGY
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United States of America Patent
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Oct 3, 2024
app pub date -
Apr 29, 2024
filing date -
Apr 3, 2023
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Abstract
A combined six-dimensional force sensor based on thin-film sputtering technology includes a force transmission table, a cross beam, a base, a top cover, a bottom cover and strain gauges. Strain gauges are sputtered on the elastomer structure to form six sets of Wheatstone bridges. The measurement method of the six-dimensional force sensor is that: an input force/moment of a certain dimension acts on the elastomer structure including the force transmission table and the cross beam through the top cover, the cross beam is deformed and resistance values of strain gauges at corresponding positions change, and output voltages of corresponding bridges change.
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