METHOD FOR MANUFACTURING A MEMS TRANSDUCER DEVICE WITH THIN MEMBRANE, AND MEMS TRANSDUCER DEVICE
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United States of America Patent
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Issued Date -
Oct 3, 2024
app pub date -
Mar 22, 2024
filing date -
Mar 28, 2023
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Abstract
A method for manufacturing a MEMS device includes forming a first solid body by forming, on a substrate, a layered structure having a thickness of a value comprised between 4 and 10 μm, with the layered structure having a first surface that is uniformly flat or planar throughout the extension thereof that faces the substrate. The method further includes forming, on a second surface of the layered structure opposite to the first surface in a direction, multiple transducer devices. The method then proceeds with coupling the first solid body to a supporting structure, and completely removing the substrate to expose said uniformly flat or planar surface.
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