FILM FORMING METHOD AND ARTICLE MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Oct 3, 2024
app pub date -
Jun 12, 2024
filing date -
Dec 17, 2021
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Abstract
The present invention provides a film forming method comprising: discretely arranging, on a substrate with unevenness, a plurality of droplets of a curable composition in a liquid form containing at least a polymerizable compound (a) as a nonvolatile component and at least a solvent (d) as a volatile component; waiting until each of the plurality of droplets discretely arranged on the substrate combines with an adjacent droplet to form a continuous liquid film on the substrate, and the solvent (d) contained in the liquid film volatilizes, and a content of the solvent (d) becomes not more than 10 vol % with respect to the whole liquid film; and curing the curable composition in the liquid form after the waiting.
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