METHOD FOR PRODUCING COMPOSITE SUBSTRATE

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United States of America Patent

APP PUB NO 20240322777A1
SERIAL NO

18736691

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of producing a composite substrate includes: forming a first layer on a lower surface side of a piezoelectric substrate having an upper surface and a lower surface facing each other and having an electrode formed on the lower surface; performing flattening treatment to set a waviness of a surface of the first layer to more than 2 nm and 70 nm or less; and joining a support substrate to a first layer side of the piezoelectric substrate having the first layer formed thereon.

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Patent Owner(s)

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NGK INSULATORS LTDNAGOYA

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  • 2024 Application Filing Year
  • H03H Class
  • 599 Applications Filed
  • 21 Patents Issued To-Date
  • 3.51 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
IIDA, Tsuyoshi Fujiyoshida-Shi, JP 2 7
YAMADERA, Takahiro Nagoya-Shi, JP 21 56

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges8934501 - 10050100150200250300350400450500550600650700750800850900950

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