ELECTRONIC DEVICE MANUFACTURING METHOD, LASER DEVICE, AND WAVELENGTH SEQUENCE CALCULATION SYSTEM

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United States of America Patent

APP PUB NO 20240322521A1
SERIAL NO

18735830

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Abstract

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An electronic device manufacturing method includes acquiring a pulse spectral shape of pulse laser light, and a target integrated spectral shape realized by the pulse laser light of pulses generated based on wavelength sequence in which a center wavelength of the pulse laser light periodically changes; calculating target center wavelengths allocated to the pulses to realize the target integrated spectral shape, and a number of allocation pulses of each target center wavelength being the number of allocation pulses per cycle of the wavelength sequence; calculating the wavelength sequence by correspondingly allocating at least one first center wavelength having the number of allocation pulses of 2 or greater so that the smaller the number of allocation pulses is, the larger a time interval of the allocation pulses for the first center wavelength is, and then correspondingly allocating at least one second center wavelength having the number of allocation pulses of 1.

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Patent Owner(s)

Patent OwnerAddress
GIGAPHOTON INC400 OAZA YOKOKURASHINDEN OYAMA-SHI TOCHIGI 3238558 ?3238558

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
FUJII, Koichi Oyama-shi, JP 46 291
ISHIHARA, Takanobu Oyama-shi, JP 35 297
WAKABAYASHI, Osamu Oyama-shi, JP 394 4239

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