TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
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United States of America Patent
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Issued Date -
Sep 26, 2024
app pub date -
May 30, 2024
filing date -
Jul 23, 2014
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Abstract
Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heating assembly. The substrate support assembly comprises a body having a substrate support surface and a lower surface, one or more main resistive heaters disposed in the body, a plurality of spatially tunable heaters disposed in the body, and a spatially tunable heater controller coupled to the plurality of spatially tunable heaters, the spatially tunable heater controller configured to independently control an output one of the plurality of spatially tunable heaters relative to another of the plurality of spatially tunable heaters.
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