CONTROL APPARATUS, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
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United States of America Patent
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Issued Date -
Sep 26, 2024
app pub date -
Mar 7, 2024
filing date -
Mar 24, 2023
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Abstract
There is provided a technique including a memory that stores an event item indicating at least one event related to a target apparatus, and a controller that is capable of controlling notifying a display of an event item corresponding to an occurred event when the event item corresponding to the occurred event is stored in the memory.
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