Importance

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Abstract

According to a method for autofocusing on a microscopic sample, measurement light having a local structure is generated. The measurement light is coupled into the microscope beam path, whereby the measurement light is incident on, and reflected by, the sample. The measurement light reflected by the sample is output from the microscope beam path and split among a plurality of component beam paths which pass over optical paths of different lengths to image the reflected measurement light, whereby a plurality of measurement images assigned to different focus positions on the microscope beam path are obtained. At least the measurement image which comes closest to an ideal image of the local structure of the measurement light is selected. Depending on the focus position assigned to the selected measurement image, a focus position to be used on the microscope beam path for the purpose of microscopic imaging of the sample is set.

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First Claim