COMPOSITIONS AND METHODS FOR THE ELETRODEPOSITION OF NANOTWINNED COPPER
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Sep 26, 2024
app pub date -
Jul 25, 2022
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Aug 5, 2021
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Abstract
A copper electrolyte comprising a copper salt, a source of halide ions, and a linear or branched polyhydroxyl. The copper electrolyte is used to deposit copper having a high density of nanotwinned columnar copper grains on a substrate. The linear or branched polyhydroxy] may comprise a reaction product between 2,3-epoxy-1-propanol and an amine compound. A leveler comprising a polymeric quaternary nitrogen species and/or an accelerator comprising an organic sulfur compound may also be added to the copper electrolyte so long as the nanotwinned columnar copper grains are maintained.
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