METHOD FOR CONTROLLING CANISTER TEMPERATURE AND RAW MATERIAL SUPPLY DEVICE
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United States of America Patent
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Issued Date -
Sep 26, 2024
app pub date -
Jun 28, 2022
filing date -
Jun 30, 2021
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Abstract
Disclosed are a raw material supply method including vaporizing a raw material in a canister, discharging the vaporized raw material, measuring an inner temperature of the canister, calculating a calculated temperature by using the inner temperature, and compensating a variation of the inner temperature by heating a heating unit disposed on the canister at the calculated temperature and a raw material supply apparatus applied to the method for supplying the raw material. The raw material supply method and apparatus may stably supply the vaporized raw material to a process space.
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