RESISTOR BETWEEN DUMMY FLASH STRUCTURES
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United States of America Patent
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Issued Date -
Sep 19, 2024
app pub date -
Apr 17, 2023
filing date -
Mar 17, 2023
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Abstract
A resistor between dummy flash structures includes a substrate. The substrate includes a resistor region and a flash region. A first dummy memory gate structure and a second dummy memory gate structure are disposed within the resistor region of the substrate. A polysilicon resistor is disposed between the first dummy memory gate structure and the second dummy memory gate structure. The polysilicon resistor contacts the first dummy memory gate structure and the second dummy memory gate structure.
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