X-RAY INSPECTION APPARATUS AND SENSITIVITY CORRECTION METHOD FOR X-RAY INSPECTION APPARATUS
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United States of America Patent
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Issued Date -
Sep 19, 2024
app pub date -
Mar 12, 2024
filing date -
Mar 14, 2023
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Abstract
The X-ray inspection apparatus includes a conveying unit configured to convey an article, an X-ray source configured to irradiate the article conveyed by the conveying unit with X-rays, an X-ray detection unit capable of detecting the X-rays by photon counting, and an inspection unit configured to inspect the article based on an output result of the X-ray detection unit, where, in a sensitivity correction of the X-ray detection unit performed when the X-ray inspection apparatus is activated, after a lapse of a predetermined period from a start of detection of X-rays, the X-ray detection unit is configured to detect X-rays not transmitting the article, and the X-ray source is configured to start X-ray irradiation during the predetermined period, and where the predetermined period is equal to or longer than a period in which irradiation of the X-ray source is stabilized.
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