WIDE INSERTION ANGLE PROCESS CARRIER
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United States of America Patent
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Issued Date -
Sep 19, 2024
app pub date -
Mar 12, 2024
filing date -
Mar 17, 2023
priority date (Note) -
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status (Latency Note)
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Abstract
Process carriers include slots defined by teeth. The slots are each configured to receive a substrate, and each of the slots has slot angle in a range from 47° to 76°. The teeth can extend half or less of a height of the process carrier. The teeth can be configured to be spaced apart by at least a thickness of the disk or wafer to be received in the slots. The teeth can be configured such that when the substrate is seated in one of the plurality of slots, a center of the substrate is positioned towards a tooth end of the process carrier with respect to a height direction of the first side wall and the second side wall.
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