LIQUID SUPPLY DEVICE AND POLISHING DEVICE
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United States of America Patent
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Issued Date -
Sep 19, 2024
app pub date -
Mar 14, 2024
filing date -
Mar 17, 2023
priority date (Note) -
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Abstract
A liquid supply device includes a swing arm capable of horizontally swinging above a polishing table, and a plurality of spray nozzles that is arranged in a longitudinal direction of the swing arm and sprays a cleaning fluid onto the polishing table, in which each of the plurality of spray nozzles has a slit-shaped fluid outlet, and a fluid outlet of the spray nozzle closer to a distal end of the swing arm is oriented to have a larger inclination angle with respect to a longitudinal direction of the swing arm in plan view.
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