IMPURITY RECOVERY DEVICE AND IMPURITY RECOVERY METHOD
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United States of America Patent
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Issued Date -
Sep 19, 2024
app pub date -
Sep 12, 2023
filing date -
Mar 13, 2023
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Abstract
An impurity recovery device according to the present embodiment may recover impurities present on a surface of a substrate. The substrate may be placed on a stage. A sprayer may spray a recovery liquid toward the substrate along a direction from a side of a central part of the substrate to a side of the end part of the substrate. A recovery portion may recover the recovery liquid from the end part of the substrate.
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