STEAM TREATMENT STATIONS FOR CHEMICAL MECHANICAL POLISHING SYSTEM
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United States of America Patent
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Issued Date -
Sep 19, 2024
app pub date -
May 16, 2024
filing date -
May 29, 2019
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Abstract
An apparatus for steam treatment of a conditioner head and/or conditioner disk in a chemical mechanical polishing system includes a conditioner cleaning cup, a boiler to generate steam, one or more nozzles positioned to direct steam inwardly into a cavity defined by the load cup, and a supply line running from the boiler to the one or more nozzles to supply steam to the one or more nozzles.
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