Piezoelectric Element Application Device
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United States of America Patent
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Issued Date -
Sep 12, 2024
app pub date -
Mar 6, 2024
filing date -
Mar 7, 2023
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Abstract
A piezoelectric element application device according to the disclosure includes: a vibration plate made of silicon oxide; a first electrode formed above the vibration plate; a seed layer formed above the first electrode and the vibration plate; a piezoelectric layer formed at the seed layer and containing potassium, sodium, and niobium; and a second electrode formed at the piezoelectric layer. The vibration plate further contains potassium and sodium. In secondary ion mass spectrometry on the vibration plate and the piezoelectric layer, an intensity of potassium in the vibration plate is lower than an intensity of potassium in the piezoelectric layer, and an intensity of sodium in the vibration plate is lower than an intensity of sodium in the piezoelectric layer.
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