CERAMIC FIBERS FOR SHIELDING IN VACUUM CHAMBER SYSTEMS AND METHODS FOR USING SAME
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United States of America Patent
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Issued Date -
Sep 12, 2024
app pub date -
May 3, 2024
filing date -
Nov 5, 2021
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Abstract
A method and apparatus to shield various components (e.g., a gasket, a sensor, a wire, a mechanical component made of metals and/or polymers) deployed in a vacuum environment using a shield assembly formed from multiple ceramic fibers. The shield assembly reduces damage to the components when exposed to a plasma and the generation of contaminants. The ceramic fibers are formed from a ceramic and arranged in a packed structure creating a tortuous trajectory that suppresses the transport of charged particles and/or contaminants through the shield assembly. The ceramic fibers are mechanically compliant and readily bent and/or packed into gaps without fracture. The ceramic fibers may also be formed into a tube to surround a fiberglass rod, a gasket, a sensor, and/or a wire. The presence of the shield assemblies also permits cleaning of the interior surfaces of the vacuum chamber using a plasma without generating contaminants from the gaskets.
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