RETICLE-LIKE SENSING ASSEMBLY
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United States of America Patent
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Issued Date -
Sep 12, 2024
app pub date -
Jan 16, 2024
filing date -
Mar 10, 2023
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Abstract
A reticle-like sensing assembly comprises a main body, a sensing module, a power supply and a wireless charging receiver. The main body has a space therein; wherein the main body has a dimension identical to the real reticle to collecting various data which affects a reticle in a lithography process. The sensing module is received in the space of the main body to sense information related to the main body and compute the information to obtain a sensing data accordingly. The power supply is received in the space of the main body and electrically connected to the sensing module to provide electric power to the sensing module. The wireless charging receiver is received in the space of the main body and electrically connected to the power supply to be driven to charge the power supply.
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