IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20240300805A1
SERIAL NO

18594944

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A microelectromechanical accelerometer is provided that includes one or more proof masses. The accelerometer also includes four sets of stator combs that form a set of four measurement capacitors together with rotor combs. Some rotor combs have a positive offset in a direction in the device plane in relation to stator, while others have a negative offset. Some rotor combs have a negative offset in a direction perpendicular to the device plane in relation to stator combs. Moreover, some stator combs have a negative offset in the direction perpendicular to the device plane in relation to rotor combs.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTD10-1 HIGASHIKOTARI 1-CHOME NAGAOKAKYO-SHI KYOTO-FU 617-8555

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BLOMQVIST, Anssi Helsinki, FI 52 404
LIUKKU, Matti Helsinki, FI 32 65
RYTKÖNEN, Ville-Pekka Klaukkala, FI 36 120

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