ION IRRADIATION OF MICROELECTROMECHANICAL RESONATORS
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United States of America Patent
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Issued Date -
Sep 5, 2024
app pub date -
Feb 22, 2024
filing date -
Feb 22, 2023
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Abstract
A method of enhancing an electromechanical coupling coefficient of a microelectromechanical (“MEMS”) device. The method includes applying, to a fully fabricated MEMS device, heavy particle ion radiation to the MEMS device at a fluence of at least 1×1014 cm−2. According to other embodiments of the present invention are directed to a bandpass filter comprising a plurality of MEMS devices fabricated in accordance with the methods provided. The MEMS of the plurality are electronically or mechanically coupled.
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