HYDROGEN IMPURITY TESTING SYSTEM AND HYDROGEN IMPURITY TESTING METHOD
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United States of America Patent
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Issued Date -
Sep 5, 2024
app pub date -
Feb 22, 2024
filing date -
Mar 3, 2023
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Abstract
The highly reliable hydrogen impurity testing system includes a sensor unit installed in an atmosphere with highly concentrated hydrogen containing toxic impurities, a heater unit capable of heating the sensor unit, and a system controller controlling the sensor unit and the heater unit. The heater unit includes a semiconductor substrate, an impurity layer of a first conductive type, a metal oxide layer, and a metal electrode layer capable of adsorbing toxic impurities being present on the surface of the metal oxide layer. The system controller detects the concentration of the toxic impurities by measuring the change in work function of the metal electrode layer according to the type and concentration of the toxic impurities, and performs a refreshing operation of desorbing the toxic impurities adsorbed on the metal electrode layer by heating the metal electrode layer with the heater unit based on the result of detection.
First Claim
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Family
Country | kind | publication No. | Filing Date | Type | Sub-Type |
---|---|---|---|---|---|
JP | A | JP2024124655 | Mar 03, 2023 | Patent | Application |
Type : Patent Sub-Type : Application | |||||
Published unexamined patent application | 水素中不純物検査システム及び水素中不純物検査方法 | Sep 13, 2024 |
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
HITACHI HIGH-TECH ANALYSIS CORPORATION | 17-1 TORANOMON 1-CHOME MINATO-KU TOKYO 105-6411 |
International Classification(s)

- 2024 Application Filing Year
- H01M Class
- 6354 Applications Filed
- 230 Patents Issued To-Date
- 3.62 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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MATOBA, Yoshiki | Tokyo, JP | 35 | 226 |
# of filed Patents : 35 Total Citations : 226 | |||
RYUZAKI, Daisuke | Tokyo, JP | 53 | 347 |
# of filed Patents : 53 Total Citations : 347 | |||
SASAGO, Yoshitaka | Tokyo, JP | 86 | 1245 |
# of filed Patents : 86 Total Citations : 1245 | |||
SUZUKI, Naoki | Tokyo, JP | 126 | 1643 |
# of filed Patents : 126 Total Citations : 1643 | |||
TAKAHARA, Toshiyuki | Tokyo, JP | 24 | 141 |
# of filed Patents : 24 Total Citations : 141 |
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- 0 Citation Count
- H01M Class
- 0 % this patent is cited more than
- 1 Age
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