POWER ALARM AND FIRE LOADING RISK REDUCTION FOR A DEPOSITION TOOL
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United States of America Patent
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Issued Date -
Sep 5, 2024
app pub date -
May 14, 2024
filing date -
Mar 19, 2021
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Abstract
A deposition tool includes a power cable pedestal including a pedestal body with a first surface and a second surface and a guide hole that extends through the pedestal body from the first surface to the second surface, where at least a portion of a sidewall of the guide hole has a slanted surface, and where the pedestal body is formed from a first material with a melting point that is higher than a melting point of Polyoxymethylene (POM). The deposition tool includes a bushing arranged over the guide hole, where the bushing is formed from a second material with a melting point that is higher than the melting point of POM.
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