SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, ELECTRICAL POWER SUPPLY SYSTEM, AND ELECTRICAL POWER SUPPLY METHOD
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United States of America Patent
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Issued Date -
Sep 5, 2024
app pub date -
May 10, 2024
filing date -
Nov 12, 2021
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Abstract
There is a substrate processing apparatus for processing a substrate, comprising: a power receiver including a power reception coil to which power is transmitted in a non-contact manner from a power transmission coil located outside the substrate processing apparatus, wherein the substrate processing apparatus is configured to supply power to at least one unit or member that uses power from the power receiver.
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