POSITIONING SYSTEM AND METHOD

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United States of America Patent

APP PUB NO 20240295583A1
SERIAL NO

18272640

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A grid plate encoder based positioning system (1) for positioning of an element is provided, the positioning system (1) comprises

    a grid plate (2) with a grid plate surface (21);an encoder unit (3) with one or more optical sensors (31) for sensing a grid plate surface pattern (23) of the grid plate surface (21);an input (7) to receive coordinates (Xd, Yd) specifying a desired position of the element;a mapping unit (8) to compute compensated coordinate data (Xa, Ya) corresponding to estimated position data expected from the encoder unit (3) when the element is positioned at a desired position (Xd, Yd) specified by the setpoint coordinates;a feedback control unit (9) providing the compensated coordinate data (Xa, Ya) as a setpoint (Xs, Ys) to a positioning unit (12), with feedback control based on the estimated position data obtained from the encoder unit.

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Patent Owner(s)

Patent OwnerAddress
NEARFIELD INSTRUMENTS B V3047 AT ROTTERDAM

International Classification(s)

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  • 2022 Application Filing Year
  • G01Q Class
  • 73 Applications Filed
  • 28 Patents Issued To-Date
  • 38.36 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
SADEGHIAN, MARNANI Hamed Rotterdam, NL 60 47
TOACSEN, Ioan-Andrei Eindhoven, NL 2 0

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges134101 - 100102030405060708090100110120130140150

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