CLEANING LIQUID FOR REMOVING CERIUM COMPOUND, CLEANING METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR WAFER
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Sep 5, 2024
app pub date -
May 9, 2024
filing date -
Nov 10, 2021
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A cleaning liquid for removing a cerium compound contains (A) a six-membered ring compound having two or more hydroxy groups, and (B) an inorganic acid compound, and a mass ratio of the component (B) to the component (A) is 0.05 to 0.6. The component (A) may contain at least one selected from the group consisting of catechol, resorcinol, hydroquinone, pyrogallol, and methylcatechol.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully