Importance

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Abstract

The excimer lamp includes: a discharge container having a substantially quadrangular shape with a cross section, the discharge container having a pair of flat walls extending in a longitudinal direction and a pair of side walls connecting the flat walls; a pair of external electrodes facing each other disposed on outer surfaces of the pair of flat walls, respectively; a first internal electrode disposed inside the discharge container so as to extend toward inner surfaces of the pair of flat walls; and a second internal electrode disposed inside the discharge container at a position spaced apart from the first internal electrode in the longitudinal direction so as to extend toward the inner surfaces of the pair of flat walls. The first internal electrode and the second internal electrode are respectively disposed at positions between end parts and central parts of the external electrodes in the longitudinal direction.

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First Claim