Importance

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Abstract

The invention is directed at a method of refurbishing a probe for use in a scanning probe microscopy device, wherein the probe is a used or damaged probe and includes a cantilever and a probe tip. The method comprises receiving the probe, determining an existing probe structure of the probe and mapping the existing probe structure for obtaining existing probe structure data. The method further includes identifying, based on the existing probe structure data, a deviation from an original probe structure of the probe prior to said using or damaging thereof. Based on the deviation, structural modification data indicative of a structural modification for modifying the probe will be determined, and, in accordance with the structural modification data, the existing probe structure will be modified by at least one of a precision material deposition process or precision material removal process, for performing said refurbishing of the probe. The method is further directed at a system and a computer program product for operating a system.

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First Claim