BROADBAND PROFILER SYSTEM AND METHOD FOR CONSTRUCTING A THREE-DIMENSIONAL PROFILE OF A TARGET
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United States of America Patent
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Issued Date -
Aug 29, 2024
app pub date -
Jun 2, 2022
filing date -
Nov 12, 2021
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Abstract
A three-dimensional profiler includes a broadband radiation source. An interferometric system receives the radiation and includes first and second beam splitters, a moving time delay-inducing reflector, and a stationary reflector. The interferometric system creates a time-delayed optical sample radiation source and an optical reference incident radiation source with the first beam splitter. A stationary sample holder receives the optical sample incident radiation. A reference plane receives the optical reference incident radiation. A detector receives an interference signal from reflected or scattered optical sample radiation and reflected or scattered optical reference radiation. A processor extracts an optical path difference between the reference plane and the sample and reconstructs a three-dimensional morphology of the sample.
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