SHUT-OFF VALVE, VACUUM PUMP SYSTEM, AND VACUUM PUMP
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United States of America Patent
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Issued Date -
Aug 29, 2024
app pub date -
Jan 8, 2024
filing date -
Feb 28, 2023
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Abstract
A shut-off valve 1 is a shut-off valve arranged on the downstream side with respect to an exhaust port of a vacuum pump, and includes a valve seat, a valve element, and a pressure receiving portion. The valve element is arranged on the downstream side with respect to the valve seat, and is configured movable so as to contact the valve seat or separate from the valve seat. The pressure receiving portion is arranged on the downstream side with respect to the valve element, and is movable to the valve seat by receiving the pressure of gas flowing back to the valve seat. The valve element is connected to the pressure receiving portion, and moves to the valve seat along with movement of the pressure receiving portion to the valve seat.
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