Organoamino-Functionalized Linear and Cyclic Oligosiloxanes for Deposition of Silicon-Containing Films
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United States of America Patent
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Aug 29, 2024
app pub date -
Mar 22, 2024
filing date -
Feb 8, 2017
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Abstract
Amino-functionalized linear and cyclic oligosiloxanes, which have at least two silicon and two oxygen atoms as well as an organoamino group and methods for making the oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized linear and cyclic oligosiloxanes are also disclosed.
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