METHOD OF INFLATING ELASTIC MEMBRANE OF POLISHING HEAD, AND POLISHING HEAD SYSTEM
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United States of America Patent
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Issued Date -
Aug 29, 2024
app pub date -
Feb 14, 2024
filing date -
Feb 27, 2023
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Abstract
A technique is disclosed that can allow an elastic membrane to be inflated into a desired shape when a workpiece is released from a polishing head, or when the workpiece is held on the polishing head, thereby avoiding excessive stress on the workpiece. The method includes supplying a gas into a first pressure chamber and a second pressure chamber at a first flow rate and a second flow rate regulated by a first flow-rate control valve and a second flow-rate control valve to inflate an elastic membrane of a polishing head when a polished workpiece is released from the polishing head, or when a workpiece to be polished is held on the polishing head. The first pressure chamber and the second pressure chamber are formed by the elastic membrane.
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