MEMS Nanopositioner and Method of Fabrication
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United States of America Patent
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Issued Date -
Aug 22, 2024
app pub date -
Apr 12, 2024
filing date -
Dec 18, 2020
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Abstract
A microelectromechanical (MEMS) device is provided. The MEMS device comprises a substrate and a movable structure flexurally connected to the substrate, capable of moving in relation to the substrate, wherein the movable structure further comprising two or more segments having at least one mechanical connection between said segments to provide structural integrity of the moving structure; and wherein the at least one mechanical connection electrically isolates at least two segments
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