PELLICLE FOR FLAT PANEL DISPLAY PHOTOMASK

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20240280908A1
SERIAL NO

18649060

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A pellicle assembly for large-size photomasks including a frame member configured to be affixed to a large-size photomask substrate, a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport, and a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage.

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Patent Owner(s)

Patent OwnerAddress
PHOTRONICS INC15 SECOR ROAD BROOKFIELD CT 06804

International Classification(s)

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  • 2024 Application Filing Year
  • G03F Class
  • 1070 Applications Filed
  • 26 Patents Issued To-Date
  • 2.43 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kasprowicz, Bryan S Dallas, US 6 0
Progler, Christopher Plano, US 9 8

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges203382101 - 1021 - 3001002003004005006007008009001000110012001300140015001600170018001900200021002200

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