PROBE CARD
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United States of America Patent
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Issued Date -
Aug 22, 2024
app pub date -
Jun 10, 2021
filing date -
Jun 10, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
Suppresses reflection from a circuit board including a light-transparent insulating film formed on an interlayer wiring to easily identify an alignment mark formed on a probe. The probe card comprises a circuit board 103 on which an insulating film 304 and an electrode pad 3 are formed and a probe 5 attached onto the electrode pad 3. The probe 5 has an alignment mark 7 identifiable from an opposite side of the circuit board 103. The alignment mark 7 is positioned outside of the electrode pad 3 on the circuit board 103. The insulating film 304 is a light-transmissive thin film covering an interlayer wiring 314. An anti-reflection film 6 with lower light transmittance than the insulating film 304 is formed in some regions on the insulating film 304. The anti-reflection film 6 is formed on a position corresponding to the alignment mark 7 and a region surrounding the position.
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