MEASUREMENT SYSTEM AND PROBE TIP LANDING METHOD
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United States of America Patent
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Issued Date -
Aug 22, 2024
app pub date -
Feb 17, 2023
filing date -
Feb 17, 2023
priority date (Note) -
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Abstract
A probe tip landing method for a measurement system is provided. The probe tip landing method includes performing a first descending operation to lower a probe toward a sample by a first descending distance; performing a second descending operation to lower the probe toward the sample; and performing an inspection operation during the second descending operation. The inspection operation includes an imaging operation, scanning the sample to obtain a first image including a probe tip of the probe; and a determining operation, checking the first image to determine that in the first image, whether a region connected with the probe tip becomes bright. The probe tip landing method further includes in response to the region connected with the probe tip in the first image becoming bright, determining that the probe has contacted a surface of the sample and the probe has landed successfully.
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