MICRO-ELECTRO-MECHANICAL SYSTEM FLUID CONTROL
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United States of America Patent
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Issued Date -
Aug 22, 2024
app pub date -
Jun 15, 2022
filing date -
Jun 16, 2021
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Abstract
A fluid-control device comprises a stack of wafers in which flow components are provided as micro-electro-mechanical systems—MEMS. The flow components are selected from fluid-control components and/or fluid-monitor components. The fluid-control device has a first flow component that is encircled, in a main plane of the stack of wafers, by a second flow component.
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