PLASMA SOURCE, AND ATOMIC CLOCK EMPLOYING PLASMA SOURCE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20240276626A1
SERIAL NO

18568770

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A small plasma source that enables highly efficient discharge in an ultra-high vacuum state includes a first magnet, a second magnet arranged so that a second magnetic pole faces the first magnetic pole of the first magnet, a third magnet having the second magnetic pole directed in the same direction as the first magnetic pole of the first magnet and arranged to surround the first magnet, a fourth magnet having the first magnetic pole different from the second magnetic pole facing the second magnetic pole of the third magnet and arranged to surround the second magnet, a first electrode provided on sides of the first magnetic pole of the first magnet and the second magnetic pole of the third magnet, a second electrode facing the first electrode and provided on sides of the second magnetic pole of the second magnet and the first magnetic pole of the fourth magnet, and a third electrode arranged between the first electrode and the second electrode. A value obtained by dividing a shorter distance between a distance between the first magnet and the second magnet and a distance between the third magnet and the fourth magnet by an average value of thicknesses of the first to fourth magnets is 1 or more and 10 or less.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGYTOKYO TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HIGURASHI, Eiji Tsukuba-shi, JP 16 211
KURASHIMA, Yuuichi Tsukuba-shi, JP 9 24
MATSUMAE, Takashi Tsukuba-shi, JP 5 0
MOTOMURA, Taisei Tosu-shi, JP 1 0
TAKAGI, Hideki Tsukuba-shi, JP 35 388
YANAGIMACHI, Shinya Tsukuba-shi, JP 2 1

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